ZEISS
2 Safety | 2.4 Warning Labels and Lights
2.3.4 Hazards generated by Radiation
X-rays
X-rays are generated inside the microscope during operation. This is unavoidable because elec-
trons are accelerated by voltages up to 30 kV.
§
Do not remove any parts around the column and chamber that are essential for radiation pro-
tection.
§
Use genuine ZEISS parts exclusively.
§
Ensure that all local safety and X-ray protection regulations are met.
§
Only authorized ZEISS service representatives are allowed to service the microscope.
An electron microscope is a radiation source in the sense of the German regulations Strahlen-
schutzgesetz (StrlSchG) and Strahlenschutzverordnung (StrlSchV). This also applies if the X-ray ra-
diation generated is evaluated by detectors (WDX, EDX). The operation of an interfering emitter is
subject to the regulations of StrlSchG and StrlSchV.
The design of the scanning electron microscope ensures that the acceleration voltage of 30 kV
and a local dose rate of 1 µSv / h at a distance of 0.1 m from the outer surfaces of the device are
not exceeded. The operation of these devices does not require a permit in Germany according to
StrlSchG and StrlSchV.
Every single device is subjected to a routine test at Carl Zeiss Microscopy GmbH in Oberkochen. A
certificate of this test is enclosed with the device (test certificate). The routine test refers to the
device in the delivered configuration.
The following points must be observed:
§
A notice is attached to the device, which indicates that X-rays are generated inside the micro-
scope.
§
Subsequent changes to the device by the user usually result in a new assessment of the de-
vice's classification with regard to the StrlSchG and StrlSchV. The user is responsible for com-
plying with the limit values prescribed in the StrlSchG and StrlSchV and the necessary check-
ing of the local dose rate after modifications.
Outside Germany, the user of the microscope has to comply with the local regulations of the
country where the microscope is operated.
Contact Radiation
Protection
For questions regarding radiation protection, contact the ZEISS Radiation Safety Officer, Carl Zeiss
AG, 73447 Oberkochen, Germany
phone: +49 (0) 7364 20 0
2.3.5 Thermal Hazards
Bakeout
Parts of the enclosure in the upper range of the column may become hot during bakeout, particu-
larly after a long bakeout cycle.
§
Do not place any combustible objects on the grids of the electron optical column during bake-
out.
§
After the bakeout procedure, let surfaces cool down before working around the column.
§
Only advanced operators are allowed to perform the bakeout procedure.
2.4 Warning Labels and Lights
All parts of the Microscope System that may pose specific hazards are marked with additional
warning labels (pictograms) on the Microscope System. These warning labels indicate potential
hazards and form part of this document. They are to be kept in clean and easily legible condition.
Check all the mandatory warning labels for: Availability, Legibility, Correctness. Damaged or illegi-
ble warning labels must be replaced immediately. Always observe all warning labels!
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006
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Summary of Contents for EVO
Page 1: ...Instruction Manual ZEISS EVO Scanning Electron Microscope...
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