5 First Operating Steps | 5.6 Finding Appropriate Detector Settings
ZEISS
3. Carefully fit the BSD in the working position.
NOTICE
Avoid any contact with the
diode surface as it can easily damage the
detector.
4. Carefully close the chamber door.
5. Pump the specimen chamber.
6. In the
Detectors
tab of the SEM Controls panel, select
BSD
from the
Signal A
drop-down
list.
7. From the
Panel Configuration Bar
, select
BSD Control
.
The
BSD Control
panel enables you to change the polarity of the segments, select BSD
modes, and set the BSD gain.
à
The
BSD Control
panel is displayed.
8. Click a segment symbol to toggle its status between on (white), inverted (black), and off
(gray).
9. To confirm the settings, click
Apply
.
10. To select compositional mode, click
BSD: COMPO
.
11. To select topography mode, click
BSD: TOPO
.
INFO:
The topography mode has a default setting that can be changed by the user. To
change the default setting, select the desired segment combination and click
BSD: Set
Topo
.
86
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006
Summary of Contents for EVO
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