ZEISS
7 Troubleshooting | 7.2 Column
This procedure consists of the following steps:
Tungsten
Filaments pre-
aligned
1.
Venting the Gun and the Specimen Chamber [
2.
De-energizing the Microscope [
3.
4.
Disassembling the Firing Unit [
5.
6.
7.
Unpacking a New Filament Holder | Tungsten Filament (Pre-Aligned) [
8.
Installing the Filament Holder to the Firing Unit [
9.
Installing the Brass Retaining Washer | Tungsten (Pre-Aligned) [
10.
Reinstalling the Firing Unit to the Gun [
11.
Reinstalling the Gun to the Microscope [
Tungsten
Filaments not-pre-
aligned
This procedure also applies to the replacement of LaB₆ filaments with tungsten filaments.
1.
Venting the Gun and the Specimen Chamber [
2.
De-energizing the Microscope [
3.
4.
Disassembling the Firing Unit [
5.
6.
7.
Disassembling the Filament Holder | Tungsten (Not Pre-Aligned) and LaB₆ [
8.
Unpacking a New Filament | Tungsten (Not Pre-Aligned) [
9.
Installing the Filament to the Filament Holder | Tungsten (Not Pre-Aligned) and LaB₆ [
10.
Installing the Filament Holder to the Firing Unit [
11.
Installing the Brass Retaining Washer | Tungsten (Not Pre-Aligned) [
12.
Reinstalling the Firing Unit to the Gun [
13.
Reinstalling the Gun to the Microscope [
LaB₆ Filaments
1.
Venting the Gun and the Specimen Chamber [
2.
De-energizing the Microscope [
3.
4.
Disassembling the Firing Unit [
5.
6.
7.
Disassembling the Filament Holder | Tungsten (Not Pre-Aligned) and LaB₆ [
8.
Unpacking a New Filament | LaB₆ [
9.
Installing the Filament to the Filament Holder | Tungsten (Not Pre-Aligned) and LaB₆ [
10.
Installing the Filament Holder to the Firing Unit [
11.
Installing the Brass Retaining Washer | LaB₆ [
12.
Reinstalling the Firing Unit to the Gun [
13.
Reinstalling the Gun to the Microscope [
14.
Starting up the LaB₆ Filament for the First Time [
15.
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006
123
Summary of Contents for EVO
Page 1: ...Instruction Manual ZEISS EVO Scanning Electron Microscope...
Page 179: ......