< 12. Troubleshooting >
12-16
IM 11M12D01-01E
(5) There may be a crack in the sensor or leakage at the sensor-mounting portion.
If the indication of concentration varies in synchronization with the pressure change in the
furnace, check whether or not there is a crack in the sensor or whether the sensor flange is
sticking tightly to the probe-attaching face with the metal O-ring squeezed.
(6) There may be leakage in the calibration gas tubing.
In the case of a negative furnace inner pressure, if the indication of concentration varies with
the pressure change in the furnace, check whether or not there is leakage in the calibration gas
tubing.
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