Veeco Dektak 150, User Manual

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E-26 3D Mapping Function
2D Analysis Plot Statistics
Surface statistics for the region between the cursors on the X profile or Y profile (see Figure
E-22 ):
•
Rq: Root mean square (RMS) roughness.
•
Ra: Average roughness.
•
Rt: Maximum height of profile, Rp + Rv.
•
Rp: Maximum peak height.
•
Rv: Maximum valley depth.
•
Angle: Angle between the two intersection points.
•
Curve: Radius of curvature of region between the cursors.
•
Terms: Terms removed under Plot Properties.
•
Avg Ht.: Average height of region between cursors.
•
Area: Area under curve between the cursors.
When one or both cursors are against the edge of the profile plot, the statistics are shown for
the entire profile.
When using Multiple Crosshairs, your profile plots include a trace for each set of crosshairs.
Click on a trace to show statistics for it. You can also right-click on the profile plot and select
Next Trace or Previous Trace .
The crosshairs corresponding to the active trace are marked on the contour plot. Therefore,
you can look to the contour plot to see for which trace the statistics are shown. Also, the title
of the profile plot appears in the color of the currently active trace.
3D Interactive Plot
The 3D interactive plot lets you view a dataset in three dimensions, from any angle, and with various
color and lighting effects.
1 Open a dataset, select Analysis > 3D Interactive Plot , Analysis > Custom Options > 3D Interactive
Plot > OK , or click the 3D Interactive Plot button to view the dataset (see
Figure E-23
).
2 Click and drag in the plot to rotate the dataset in all three dimensions.
NOTE –
While the data is rotating, Vision switches to a low-resolution mode to re-draw the
plot in real time.