Veeco Dektak 150, User Manual

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A-2 Facilities Specifications
Table A-2: Dektak 150 Dimensions and Weight
Vibration Interference
Do not operate the system near sources of vibration (such as fans or motors) or in excessive air flow
(such as from a cleanroom air duct). For optimum performance, place the tool in an area with
minimal foot traffic and low acoustical noise.
Floor
The floor must be level, rigid and capable of supporting the Dektak 150 surface profiler on a bench or
the preferred vibration isolation table.
System Location and Service Access
Position the system with the work area in front to allow adequate working space for the operator. The
rear of the system must have a minimum service access clearance of 24" (610 mm).
Compressed Air 80 psi (if optional vibration isolation platform or table is
used)
Vacuum 20 mm Hg (If optional ceramic vacuum chuck is used)
Acoustics Not to exceed 60 dB(A) across the frequency spectrum.
DIMENSIONS AND WEIGHT
Profiler Dimensions 292 mm W x 508 mm D x 527 mm H
(11.5 in. W x 20 in. D x 20.75 in. H)
Enclosure Dimensions 28.0 in. L x 19.8 in. W x 26.0 H
(71.1 cm L x 49.8 cm W x 66.0 cm H)
Profiler Weight 34 kg (75 lbs.), 115 lbs shipping weight
Enclosure Weight 21.7 kg (48 lbs.)
Shipping Box Dimensions Box 1 (computer): 22” x 22” x 14”
Box 2 (system): 24” x 18” x 22”
Box 3 (system accessories): 22” x 22” x 12”
Box 4 (enclosure): 36” x 36” x 24”
Box 5 ( optional monitor): 18” x 15” x 7”
Box 6 (optional vibration isolation table or platform): 42” x 36” x 50” (table)
or 29” x 30” x 6” (platform)
Facility Requirement