Veeco Dektak 150, User Manual

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Stress Measurement C-5
ENTERING STRESS PARAMETERS
Once you identify the substrate material and orientation, you can enter other stress parameters in the
Stress Parameters dialog box (see Figure C-3 ).
1 Verify the correct value displays in the Elasticity field. If the elasticity of the substrate is different than the
value displayed, click Editor and enter the correct value.
2 Click the Substrate thickness field and enter that value in
μ
m.
3 Click the Film thickness field and enter that value in
μ
m.
4 Verify that the cursor positions are in the desired location.
5 Click OK if the stress is to be measured against the default straight line reference to display the stress
result.
6 Click the ... button in the PreDeposition Data File section if the stress is to be measured against a
reference scan produced earlier and saved in a data file. The Specify File dialog box opens.
7 Browse the data folder and choose the appropriate file. Click Select to close the Specify File dialog box.
8 Select the Enable Stress check box in the Stress Parameters dialog box.
9 Click OK to close the Stress Parameters dialog box.
STRESS RESULTS
The statistical stress results appear in the Analytical Results window (see Figure C-5 ).
Figure C-5: Analytical Results Window
You can obtain a printout of stress results by either selecting File > Print or clicking the Print button
on the toolbar.
Upon completion of the stress computation, you can display the stress data traces in the Data Plot
window. Select Plot > Display Options from the menu bar or right-click on the plot and select
Display Options to open the Display Parameters dialog box (see Figure C-6 ).