Veeco Dektak 150, User Manual

Page: 145 / 349

5-40 Multiple Scan Operation
RUNNING A MULTIPLE SCAN ROUTINE
Figure 5-66: Data Plot Window Showing a Multiple Scan Routine
1 Click Run > Auto Program . The following sequence of events occurs:
•
The Data Plot window appears with the scaled grid superimposed over the camera view pane of the stylus
and calibration standard.
•
The stylus lowers onto the sample surface. After a brief pause, the scan commences. As the stylus scans
across the calibration standard, the full scale profile trace plots on the scaled grid in real time (see
Figure
5-66
).
NOTE –
With many camera setups, during a scan the video image shows the sample
moving from right to left below the stylus. In actuality, the stage is moving from back to front.
•
Once the first scan is complete, the stylus lifts off the surface, and the stage resets to the starting point of
the next programmed scan.
•
When the final scan is complete, the stylus lifts, and the stage returns to the location where the scan
originated. The profiler then automatically replots and rescales.
NOTE –
If problems occur during a scan, you can log them and send them to Veeco. If you
need to abort a scan, see
Aborting an Operation on page 4-21
.