Veeco Dektak 150, User Manual

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D-6 Step Detection Function
Band Width Section
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R : Width of R cursor band positioned to the left of the potential step being detected.
•
M : Width of M cursor band positioned to the right of the potential step being detected.
Additional Parameters
•
Smoothing : Factor used for smoothing. Larger values result in more smoothing.
•
Tolerance: Error factor used for calculating the height and width of the matching step.
•
+ Step : When selected, Step Detection will search for the first positive step matching Step
Description parameters.
•
- Step : When selected, Step Detection will search for the first negative step matching Step
Description parameters.
Analytical Functions Section
Select the check boxes for the analytical functions desired:
•
ASH : Computes Average Step Height function.
•
Slope : Computes Slope function.
•
AvgHt : Compute Average Height function.
•
Peak : Compute Maximum Peak function.
•
Valley : Compute Maximum Valley function.
•
P_V : Compute Maximum Peak to Valley function.
•
Compute Average : Compute the average of all results of each selected analytical function.
Then select each of the desired functions in turn from the Function drop-down list to enter
the appropriate cursor information in the grid for each function.
Distance to Step Columns
R (
μ
m)
The relative distance from the beginning of the detected step at which to place the R cursor
prior to performing the corresponding analytical function. Negative values fall to the left of
the beginning of the step, positive values to the right. You may enter up to 10 distances for
each analytical function.
M (
μ
m)
The relative distance from the beginning of the detected step at which to place the M cursor
prior to performing the corresponding analytical function. Negative values fall to the left of
the beginning of the step, positive values to the right. You may enter up to 10 distances for
each analytical function.