Veeco Dektak 150, User Manual

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Facilities Specifications A-1
A
F
ACILITIES
S
PECIFICATIONS
As a a high-precision measuring instrument capable of measuring minute physical surface variations,
the Dektak 150 is extremely sensitive to the environment in which it operates. You must set up one of
the following operating environments:
•
Normal Operating Conditions : The area that houses the Dektak 150 must be free from
excessive dust. Vibration levels must be minimal. The scan head must be protected to eliminate
drafts. The door to the environmental enclosure should be closed both when and when not
making measurements.
•
Reference Operating Conditions : For very critical measurements, you can purchase an
optional vibration isolation table or platform that is designed for use with the Dektak 150. The
scanning mechanism is sensitive to transient convective flow. After turning on the system,
allow it to stabilize for at least 15 minutes.
Table A-1 lists the facilities requirements of the Dektak 150 system. Table A-1 lists its dimensions
and weight.
Table A-1: Facilities Requirements
Facility Requirement
Temperature Operating Range, 20°-25°C (68°-77°F).
Clean Room Not required. (Class 1000 or better recommended.)
Relative Humidity 50%, +/-20% relative humidity (non-condensing)
Input Voltage 100 - 240 V
~
, 50 - 60 Hz, 3.0 A
Power Demand 720 VA maximum
Power Connection Four 6-ft, 3-conductor, 16AWG power cords supplied with
system. Cords terminate with male NEMA L5-15
connectors. Connectors rated for 13 amps, 1,625 watts @
125 VAC.
Warm-up Time 15 min. for maximum stability
Vibration Not to exceed 70
µ
g from 1 to 100 Hz on floor with flat
noise spectrum.