Chapter Three: Overview
Inside the Type 146 Unit
63
Mass Flow Controller Board
On the end of the Mass Flow Controller (MFC) board is a 15-pin female Type “D” connector.
The table below shows the connector pinout. A list of MKS mass flow controllers, along with
their cables, is shown in Table 20, page 64.
Mass Flow Controller Connector Pinout
Pin Number
Assignment
1
No Connection
2
Signal In +
3
Valve Close output (active low open collector)
4
Valve Open output (active low open collector)
5
Power Ground
6
-15 Volts
7
+15 Volts
8
Set Point Signal Output
9
Fault Input (active low TTL): Reserved
10
Open
11
Set Point Remote Sense
12
Signal Common
13
No Connection
14
No Connection
15
Chassis Ground
Table 19: Mass Flow Controller Connector Pinout
Note
A “No Connection” assignment indicates that the pin has no internal
connection.
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