Mass Flow Controller Messages
Appendix G: Board Specific Commands
324
Mass Flow Controller Messages
The 146 instrument supports all MKS mass flow controllers, and equivalent flow controllers.
Mass Flow Controller Messages
Function
Description
Command
Range and Restrictions
Power
Channel
power
@081<para>:<state>
<para> is the channel number 1, 2, 3, or 4
<state> is ON for on; OFF for off
MFC must be installed
Configuration
MFC range
@061<para>:<rng>
<para> is the channel number 1, 2, 3, or 4
<rng> is a number between 0.0002 sccm
to 1 x 10
5
sccm
Operating
mode
@101<para>:<mode>
<para> is the channel number 1, 2, 3, or 4
<mode> is R for Ratio
S for Set Point
T for Totaling
Set Point
value
@102<para>:<value>
<para> is the channel number 1, 2, 3, or 4
<value> is from
±
105% MFC F.S. range
Totaling co-
channel
@103<para>:<chan>
<para> is the channel number 1, 2, 3, or 4
<chan> is the co-channel number
Override
@104<para>:<cmd>
<para> is the channel number 1, 2, 3, or 4
<cmd> is O for Open
C for Close
N for Cancel
Calibration
Zero
function
@056<para>:<state>
<para> is the channel number 1, 2, 3, or 4
<state> is ON for on; OFF for off
Sensor must be installed
Zero
channel
@051<para>
<para> is the channel number 1, 2, 3, or 4
Command only
Sensor must be in range or underrange
Zero function must be on
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