Chapter Seven: Operation in Setup Mode
How To Perform Sensor Calibration/MFC Setup
191
3. Enter a channel number in the left display.
A. If the display is correct, press the [
ENTER
] key.
B. If the display is not correct, press the correct channel number, (1 through 4), then
press the [
ENTER
] key.
The system responds by accepting the channel number input, changing all the other
parameters on the screen to what is appropriate for the selected channel, and causing the
main display to blink. Depending upon what kind of sensor is associated with the
selected channel, one of three windows is possible.
In the right display there is a code for the input channel sensor type. Refer to Figure 55
for a list of codes and sensor types.
Linear
107
Pirani
Convection
Cold Cathode
Mass Flow Controller
HPS CEP
Capacitance Manometer
Code
Sensor/MFC
Capacitance Manometer
Capacitance Manometer
120
Hot Cathode (high power)
Hot Cathode (low power)
MKS TC-1A Thermocouple
Hastings DV-6M Thermocouple
Figure 55: Sensor Codes for Sensor Calibration
This chapter reviews the sensor calibration for each sensor category separately, and then covers
the MFCs and thermocouples.
Note
All the instructions in How To Perform Sensor Calibration assume that
steps 1 through 3 on the previous page have been performed.
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