How To Perform Sensor Calibration/MFC Setup
Chapter Seven: Operation in Setup Mode
190
How To Perform Sensor Calibration/MFC Setup
Sensor calibration is used to adjust parameters that are specific to different gauge types or to a
mass flow controller (MFC). The 146 unit determines which type of sensor is connected to the
selected channel, however, the sensor must be powered on for the determination to be accurate.
If the sensor is off, the 146 unit reports the last type of sensor connected and powered by that
channel.
Sensor calibration allows you to adjust parameters specific to each channel type, as listed in
Table 49.
Sensor Configuration Parameters
Type
Adjustable Parameters
Pirani or Convection Gauge
Gas Type
Gauge Calibration Parameters:
Zero* - factory or user defined
Span* - factory or user defined
Hot Cathode Gauge
Sensitivity
High Pressure Shutoff
Disconnect Threshold
Cold Cathode Gauge
Gauge Correction Factor
Disconnect Threshold
Capacitance Manometer
Sensor Range
Resolution (except Type 107 transducer)
Mass Flow Controller
Range (entered and displayed in sccm)
Thermocouple Gauge
Gas Type
Table 49: Sensor Calibration Parameters for Each Channel Type
1. Repeatedly press the [
DISPLAY MODE
] key until the 146 unit is in Setup Mode.
The system responds by scrolling through modes.
2. Use the arrow keys to scroll to the
SENSOR CAL
legend.
The system responds by scrolling through legends.
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