MKS 146C, Instruction Manual

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General Information Chapter Four: Operation in Normal Mode
102
Normal Mode is Used when Performing the Following Procedures
Normal Mode Functions
Function Comments
View most System Status
Information Displays the pressure readings from up to four different
sensors.
Display software version Lists the software version number.
Switch Channel in the Main
Display Selects what to show in the main display. The choices are
channel 1, 2, 3, 4, or dual channel display function 1 or 2.
Turn a Channel ON/OFF Turns power to a sensor on or off, and turns the sensor’s
channel on or off. Only the channel (not the sensor power) is
turned off for capacitance manometers and mass flow
controllers.
Turn an Alarm ON/OFF Enables/disables standard alarms A and B, and optional
alarms C and D.
Zero a Sensor/MFC Sets the zero pressure point for a sensor.
Toggle the Zero-of-a-
Sensor/MFC On and Off Toggles between undoing the zero, and then re-instating the
zero, once a sensor has been zeroed.
Span a Pirani Sensor to
Atmosphere Sets the upper pressure reading of a Pirani sensor equal to 760
Torr or Atmosphere (Atm), whichever is applicable.
Span a Sensor with a
Reference Spans the sensor of a selected channel to the reading of
another sensor.
Toggle the Span-of-a -Sensor
On and Off Toggles between undoing the span, and then re-instating the
span, once a sensor has been spanned.
Set Lower and Upper Points
for Analog Set Point
Calculations Changes the analog set point by adjusting the analog set point
input voltage.
Command MFC Open/Close
Overrides Moves an MFC to full open or full close within two seconds
when commanded with one of these overrides.
Cancel MFC Open/Close
Overrides Cancels an override that is in effect.
Start Hot Cathode Low/High
Power Degassing Starts low power or high power degassing for a hot cathode
which is currently powered on.
Stop HC Degassing Ends the degassing (low power or high power) function
currently underway.
Table 38: Normal Mode Functions
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