Page 68 Leica EM TIC 3X Operating Manual 07/17
4.4.2.3 Guns status
As soon as the process starts the grey color of the gun symbol becomes yellow
which means the set voltage and current values are not achieved yet. The color of
the gun becomes green as soon as the set voltage and current values are achieved.
In case of a short circuit the color of the gun becomes red (see chapter maintenance
and service).
The remaining process time of the step is displayed below the gun symbols. In case
different gun times are selected, the remaining process time shows the longest
process time (gun with longest process time).
Auto-Purge:
When the ion source becomes instable, the process will be interrupted and an
automatic Ar-purge will be performed. During the auto-purge and restart
procedure the following message will be displayed:
“One time auto purge and process restart executed!”
Auto-Current-Tuning:
The TIC 3X ion source has certain couples of voltage and current for stable
operation. Optimal current values will be set and displayed automatically for
each voltage and can be changed manually. However, depending on the ion
source
’s age and contamination the optimal current values may change. The
TIC 3X is equipped with an auto-current function, which is tuning the source
current of each gun separately in case of an instable ion source until stability
has been reached. During process the corrected value will be displayed in the
ion source set window. After the process has been finished the auto-current
will reset to the original value.
Tuned values are related to the internal current of the ion sources and have no
significant influence on the milling rate and on the heat impact on the sample.
