Page 46 Leica EM TIC 3X Operating Manual 07/17
4.3.2 Vacuum system
The vacuum system consists of a roughing pump and a turbomolecular drag pump.
The roughing pump is a two-stage diaphragm pump. The turbomolecular drag pump
is connected to the rear of the vacuum chamber by a flange. It is equipped with an air
cooling system.
The vacuum system creates an ultimate vacuum < 1 x 10
-5
mbar (1 x 10
-3
Pa).
Pressure is monitored by ion pressure measurement tubes (Pirani for low vacuum,
and cold cathode for high vacuum).
4.3.3 Standard sample stage (optional)
The sample is shielded by the mask, so that a 90° cut (cross-section) is created into
the sample.
The stage is used for loading the system with the sample and must be opened in
order to change samples. The standard stage supports both the mask holder with the
mask and the sample stage, which can be moved in three axes using micrometer
screws. The following displacements can be carried out for the individual axes:
•
lateral: 10 mm
•
vertical: 2 mm
•
travel range between mask and sample: 6 mm
The stage can be tilted through 90° to adjust the sample.
The sample is secured on a removable sample tray. The standard stage includes two
sample holders each for sample thicknesses from 0 to 5 mm and from 5 to10 mm.
The maximum sample size is 50 x 50 mm.
Table flange with standard sample stage and displacement paths:
vertical 2 mm
lateral 10 mm
