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Page 53 Leica EM TIC 3X Operating Manual 07/17

4.3.8

Triple Ion source

The triple ion source consists of a source body with three independently controllable
saddle field ion sources. The sources are arranged at a fixed angle of 50° relative to
each other. The crossover of the three ion beams is at the edge of the mask. The
triple ion source operates in a high voltage range from 1

…10 kV with source currents

from 0.5 … 4.5 mA.

Triple ion source in the chamber:

Ion gun disassembled from system:

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Summary of Contents for EM TIC 3X

Page 1: ...From Eye to Insight OPERATING MANUAL EM TIC 3X 167190032 Version 07 17 ...

Page 2: ...d manufacturing techniques used to provide our customers with excellent products Any copyrights of this document are retained by Leica Mikrosysteme GmbH Vienna Any reproduction of text and illustrations or any parts thereof by printing photocopying or other methods including electronic systems and media requires express prior permission in writing Issued by Leica Mikrosysteme GmbH Hernalser Haupts...

Page 3: ...a EM TIC 3X Serial Number Date of purchase For the instrument serial number please refer to the name type label on the back of the instrument Please read this operating manual carefully before operating the instrument For Research use only ...

Page 4: ......

Page 5: ...ssioning Particular attention must be paid to the aspect of safety This operating manual must be retained for future reference Texts schedules and tables may not be copied reproduced or divulged to third parties without our express consent It should be noted that this operating manual does not constitute a part of any existing prior agreement or covenant or legal relationship All obligations are d...

Page 6: ...4 Safety measures before use 13 2 9 5 Qualification of operating personnel 13 2 9 6 Residual hazards 14 2 9 7 Emergency procedure 14 2 9 8 Liquid Nitrogen LN2 used for the cooling stage optional 14 3 Installation and set up 18 3 1 Transportation and storage conditions 18 3 2 Installation requirements 18 3 2 1 Working area conditions 18 3 2 2 Connections requirements 18 3 3 Installing assembling an...

Page 7: ...9 4 3 6 Rotary Stage optional 51 4 3 7 Leica EM VCT500 docking port optional 52 4 3 8 Triple Ion source 53 4 3 9 Gas supply control 54 4 3 10 LCD touch control panel 54 4 3 11 Stereo microscopes 55 4 4 Principle operating and display functions 56 4 4 1 Exchanging the stages when different stages are ordered 56 4 4 2 User Interface 62 4 4 2 1 Setting the parameters 63 4 4 2 2 Status information and...

Page 8: ...source 84 5 6 2 7 Disassembling and assembling the triple ion source 86 5 6 2 8 Exchange of the complete ion source 88 5 6 2 9 Cleaning the ion source components 90 5 6 2 10 Instability of the ion source with a high life time and low kV setting 95 5 6 3 Exchanging fuses 95 5 7 Cleaning the Leica EM TIC 3X 96 5 8 Maintenance schedule summary 96 6 Troubleshooting 97 6 1 Error messages 97 6 2 Malfunc...

Page 9: ...n or respective section of text and is relevant for the operation or maintenance of the system or indicates important descriptions or additional remarks Symbols in this manual and their meaning Danger All paragraphs in the operating manual that contain instructions regarding possible hazards are identified with this symbol Failure to observe these alerts may result in serious injury Users of the i...

Page 10: ...sufficient to cause shock burn or death Disconnect and lockout power before servicing Danger of pinching the fingers when closing the flange stage Hot surface during and right after processing the sample Allow to cool before servicing the ion source LN2 is used to cool down the sample To avoid serious burns or frostbite follow safety information before disconnecting fluid lines Lifting hazard The ...

Page 11: ...ion for the LN2 tube from the LN2 pump in case the system is equipped with the cooling device Connection for ring LED or coaxial LED illumination Port to connect a 16GB USB memory stick for data up and download This product has been tested to the requirements of CAN CSA C22 2 No 61010 1 second edition including Amendment 1 or a later version of the same standard incorporating the same level of tes...

Page 12: ...ification 1 1 1 Product Leica EM TIC 3X Triple Ion Beam Cutter system 1 1 2 Name and address of the manufacturer Leica Mikrosysteme GmbH Hernalser Hauptstrasse 219 A 1170 Vienna Tel 43 1 488 99 0 Fax 43 1 488 99 350 Internet http www leica microsystems com ...

Page 13: ...the sample s state of aggregation to change If so using the cooling stage is recommended The Leica EM TIC 3X must not be used beyond the limits specified in its technical data sheet An inert gas preferably argon is used as the working gas If other gases are used for reactive processing of samples the appropriate safety measures purging removal of exhaust air must be put in place not only for the w...

Page 14: ...2 Drawer unit to load the sample in the vacuum chamber 3 Touch sensitive control panel 4 Instrument table 5 LN2 pump optional 6 LN2 Dewar optional 7 Microscope support column 8 LED illumination 9 Access to E W traverse knob Opposite side is sample Z movement 10 USB port 1 1 2 3 4 5 6 7 8 9 10 ...

Page 15: ...nergy consumption energy conditions Power consumption Maximum 300 W 2 6 Sound emissions The continuous sound level emitted by the Leica EM TIC 3X Triple Ion Beam Cutter system is about 50 dB A 2 7 IP code of the electrical devices The electrical devices are equipped with housings and covers and are therefore designed to provide degree of protection IP 20 contact protection blocking finger access p...

Page 16: ... Injuries may be sustained that could lead to death The Leica EM TIC 3X Triple Ion Beam Cutter system must not be operated unless all covers are properly in place Caution Some of the components inside the system may become hot and present a danger of injury Burns may be sustained The Leica EM TIC 3X Triple Ion Beam Cutter system must not be operated unless all covers are properly in place Caution ...

Page 17: ...rectly the system may be damaged 2 9 4 Safety measures before use The Leica EM TIC 3X Triple Ion Beam Cutter system must be installed by authorized staff of Leica representatives Note The system should be switched off for maintenance and servicing only not at the end of a work session The system must be installed correctly before it is commissioned by the technical service The supply of power and ...

Page 18: ...uspended until the malfunction or damage has been corrected All modifications and conversions to the system are prohibited and leads to exclusion of guarantee 2 9 7 Emergency procedure If unusual operating conditions or unaccustomed noises occur the system must be switched off using the main switch on the system if necessary If firefighting measures are called for a CO2 fire extinguisher must be u...

Page 19: ...e working area well ventilated Bring objects at room temperature carefully into contact with LN2 Initially an insulating gas layer is formed preventing a large transfer of heat During this initial period little LN2 evaporates However once the object has cooled down there may occur unexpected strong boiling and spurting of LN2 In the case of burns from LN2 splashes rinse the affected skin immediate...

Page 20: ...n open flannel cloth h to protect your hands from the cold Gloves should be used only to grasp dry cold parts They are unsuitable for LN2 work Only use metal Dewars specifically designated for storage of LN2 since only containers of this kind exclude risks during storage For routine cryo preparation metal troughs 1 cm Styrofoam insulation Styrofoam containers or plastic troughs are eminently suita...

Page 21: ...with protected ground Before connecting it to the local electrical supply make sure that the mains has the required ground and that the instrument is connected to it according to the local regulations Unplug the instrument before installing or changing fuses HAZARD WARNING LIQUID NITROGEN LN2 Suffocation Any vessel containing LN2 is a potential hazard One litre LN2 produces 700 litres N2 gas N2 ga...

Page 22: ...ing area conditions A working area of about 150 mm must be maintained all around the system to allow the supply connections to be made and also to enable access for essential servicing activities The Leica TIC 3X must be set up on a stable laboratory workbench with a surface area of at least 800 mm x 900 mm When selecting a setup location bear in mind that the system weighs approx 62 kg The instru...

Page 23: ...m should be transported with a forklift truck After selecting the installation location remove and store the outer packaging Check the disassembled components that are secured on the housing to ensure that nothing is missing or damaged To unpack the system proceed as follows 1 Remove the packaging straps around the crate containing the Leica EM TIC 3X Triple Ion Beam Cutter system ...

Page 24: ...Page 20 Leica EM TIC 3X Operating Manual 07 17 2 Open the crate and remove the packing material 3 Carefully remove the boxes of the accessories 4 Remove the inner cover of the packaging ...

Page 25: ...anual 07 17 5 Lift the shipping crate up off the pallet 6 Remove the foam shipping protection around the Leica EM TIC 3X 7 Remove the Leica EM TIC 3X from the foam material on the pallet Grip the instrument from the recesses of the foam ...

Page 26: ...roughing pump is decoupled when the feet are not in direct contact with the chassis of the instrument The feet of the roughing pump are placed on the instrument table and should not contact the base plate of the instrument which might be the case when moving the instrument to its final position Slightly lift up the instrument vertically and lower it to its final position again Now the feet of the ...

Page 27: ...mpensate for unevenness of the floor use spirit level This adjustment has to be carried out before putting the instrument on the table 2 The Leica instrument table has four recesses a to position the feet of the instrument a In addition four recesses to position the feet of the roughing pump b When setting up the instrument make sure all feet are properly positioned in their recesses a b ...

Page 28: ...ghtly lift up the instrument vertically in order the feet of the roughing pump will not interfere with the base plate 3 3 3 Installing the arm rests of the Leica instrument table 1 When placing the work plate on top of the chamber the stereo microscope of the instrument can be used to manipulate the sample To provide a comfortable posture arm rests can be attached to the front of the instrument ta...

Page 29: ... Mount the arm rests in such a manner that the tongue rests on the groove of the guide bar Clamp the arm rest with the star handle against the screw nut 3 Adjustment screws of the arm rest star handle for longitudinal and lever for height adjustment ...

Page 30: ...instrument table 1 The instrument table is equipped with holders for the Argon gas bottle a and the LN2 pump b 2 Use the safety belt to clamp the Argon gas bottle To secure the LN2 pump lift up the holder until it securely clamped by the clamping mechanism Latch the holder with the folding lever b a ...

Page 31: ...ormation about the stereo microscope see enclosed manual of the stereo microscope 1 Move the clamping ring on the column of the stereo microscope This ring is used to hold the stereo microscope in its height position when it is swivelled 2 Move the stereo microscope carrier on the column as shown in the picture ...

Page 32: ...Page 28 Leica EM TIC 3X Operating Manual 07 17 3 Insert the stereo microscope into the carrier 4 Clamp the microscope with the clamping screw ...

Page 33: ...perating Manual 07 17 5 Insert the eyepieces 6 Place and clamp the ring LED on the stereo microscope The clamping screw should be located at the 2 o clock position Thus the segments of the illumination are in the right position ...

Page 34: ...e left side of the carrier of the column and finger tighten the screw 3 3 6 Assembling the stereo microscope M80 with 0 8x objective 1 Move the clamping ring on the column of the stereo microscope This ring is used to hold the stereo microscope in its height position when it is swivelled ...

Page 35: ...Page 31 Leica EM TIC 3X Operating Manual 07 17 2 Move the stereo microscope carrier on the column as shown in the picture 3 Insert the stereo microscope into the carrier ...

Page 36: ...Page 32 Leica EM TIC 3X Operating Manual 07 17 4 Clamp the microscope with the clamping screw 5 Place the Ergo Wedge onto the microscope body ...

Page 37: ...Page 33 Leica EM TIC 3X Operating Manual 07 17 6 Clamp the Ergo Wedge with the screw on the front side of the Ergo Wedge 7 Place the binocular tube onto the Ergo Wedge ...

Page 38: ...Page 34 Leica EM TIC 3X Operating Manual 07 17 8 Clamp the binocular tube with the screw on the rear side of the binocular tube 9 Insert the eyepieces ...

Page 39: ...ual 07 17 10 Mount the 0 8x objective onto the microscope body 11 Place and clamp the ring LED on the 0 8x objective The clamping screw should be located at 2 o clock position Thus the segments of the illumination are in the right position ...

Page 40: ...n flange is equipped with an optical grade viewing port and a protective glass produced at a lower quality level In order to utilize the full optical quality of the M80 highest magnification setting it is recommended to remove the protective glass For doing so please refer to chapter 5 6 1 Move the clamping ring on the column of the stereo microscope This ring is used to hold the stereo microscope...

Page 41: ...Page 37 Leica EM TIC 3X Operating Manual 07 17 2 Move the stereo microscope carrier on the column as shown in the picture 3 Insert the stereo microscope into the carrier ...

Page 42: ...Page 38 Leica EM TIC 3X Operating Manual 07 17 4 Clamp the microscope with the clamping screw 5 Place the coaxial LED illumination onto the microscope body and clamp it with the clamping screw ...

Page 43: ...ing Manual 07 17 6 Place the Ergo Wedge onto the coaxial LED illumination and attach the binocular tube Insert the eyepieces in the binocular tube 7 Move the movable lens adapter on the microscope body until it touches the end stop ...

Page 44: ...X Operating Manual 07 17 8 Orientate the lens adapter in such a manner that the set screws are in 3 and 6 o clock position Clamp the adapter with the two grub screws 9 Mount the 1 6x objective onto the moveable lens adapter ...

Page 45: ... EM TIC 3X Operating Manual 07 17 10 Connect the cable on the rear side of the coaxial LED illumination 11 Connect the other end to the port of the left side of the carrier of the column and finger tighten the screw ...

Page 46: ...et the sample detail into the centre of the field of view Hence it is recommended to use the adapter for the 0 8x objective as well 1 Move the movable lens adapter on the microscope body until it touches the end stop 2 Orientate the lens adapter in such a manner that the set screws are in 3 and 6 o clock positions Clamp the adapter with the two grub screws ...

Page 47: ...efore transporting the instrument 3 3 10 Electrical and gas connections The electrical and gas connections must be set up on the back of the Leica EM TIC 3X Triple Ion Beam Cutter system by qualified technicians Electrical and gas connections on the system Secure argon connecting line with size 12 open end wrench Use delivered argon tube or tubing without plasticizer only Screw in the air filter f...

Page 48: ...es with reference to the order 3 Draw up an acceptance report with a list of defects and missing parts if necessary 4 Install the system see 3 3 5 Connect the system see 3 3 10 6 Start the system and the pump system see 4 4 7 Test the vacuum The system should reach its basic pressure of 5 x 10 5 mbar after the pump has been working for about an hour 8 Purge the argon lines and the gas supply contr...

Page 49: ...he Leica EM TIC 3X Triple Ion Beam Cutter The Leica EM TIC 3X Triple Ion Beam Cutter system includes the following main functional units 1 Chamber 2 Vacuum system turbomolecular pump diaphragm pump vacuum measuring cell 3 Table flange with sample stage exchangeable 4 Triple ion source 7 LCD control panel 8 Optical microscope with sample illumination 9 Housing 4 3 Functional description 4 3 1 Chamb...

Page 50: ...hat a 90 cut cross section is created into the sample The stage is used for loading the system with the sample and must be opened in order to change samples The standard stage supports both the mask holder with the mask and the sample stage which can be moved in three axes using micrometer screws The following displacements can be carried out for the individual axes lateral 10 mm vertical 2 mm tra...

Page 51: ... hand set screw lateral position is set using the right hand set screw Distance between sample and mask distance between sample and mask is set using the center set screw Please refer to the operating manual of the standard stage for proper usage travel range between sample and mask 6 mm ...

Page 52: ...rs are available for sample size 10 x 10 mm and 0 to 3 mm thickness for sample size 10 x 10 mm and 2 5 to 6 mm thickness Table flange with multiple sample stage and displacement paths vertical position is set using the left hand set screw distance between sample and mask is set using the right hand set screw travel range 4 mm Please refer to the operating manual of the standard stage for proper us...

Page 53: ...nation on the sample is avoided Three types of gold plated copper sample holders are available for sample size 10 x 10 mm and 0 to 4 mm thickness for sample size 10 x 10 mm and 2 to 7 mm thickness for sample size 25 x 25 mm and 0 to 5 mm thickness Table flange with cooling stage and displacement paths vertical position is set using the left hand set screw lateral position is set using the right ha...

Page 54: ...into the Dewar filled up with LN2 Hold the pump for a while until the strong boiling decreases and carefully lower the pump until it is completely immersed The clean Dewar vessel has to be filled with LN2 according to the safety precautions Connect the LN2 hose with its threaded connection to the LN2 pump Open the shutter by pushing the lever before connecting the hose Please refer to the operatin...

Page 55: ...llows to perform cross sectioning of a sample using the triple ion beam technique Specifications for ion beam polishing Max sample diameter 38 mm Max Ion beam prepared area Ø 25 mm Max sample height 12 mm Lateral movement 12 5 mm Lateral speed 0 1 to 2 mm sec Incident angle 0 to 48 1 5 increments Rotation speed Low 4 rpm Medium 7 rpm High 10 rpm Oscillation 20 45 90 180 360 Specification for ion b...

Page 56: ...ly into the Cryo SEM und optimal environmental condition using the transfer shuttle of the Leica EM VCT500 vacuum cryo transfer system Specification for ion beam cross sectioning holders Max sample thickness 4 mm Max sample height 7 mm Max sample width 10 mm Holders for high pressure frozen samples Available for 3 mm and 6 mm diameter carriers in vertical and horizontal positions Please refer to t...

Page 57: ... controllable saddle field ion sources The sources are arranged at a fixed angle of 50 relative to each other The crossover of the three ion beams is at the edge of the mask The triple ion source operates in a high voltage range from 1 10 kV with source currents from 0 5 4 5 mA Triple ion source in the chamber Ion gun disassembled from system ...

Page 58: ...anel The LCD control panel operates on its own software Parameters for the cutting process are input via this software The touch screen on the LCD panel serves as the input device The desired values can be entered using arrow buttons which appear automatically in the software screens when certain functions are called Arrow buttons in a screen mask The software can be updated by the customer using ...

Page 59: ...y placing the working plate on top of the chamber In order to set the stereo microscope in the correct observation position there are different coloured rings on the column of the stereo microscope Scales of the cross hair reticule built in one eyepiece S9E one increment corresponds to 25 µm at the highest zoom magnification M80 77x one increment corresponds to 15 µm at the highest zoom mag M80 23...

Page 60: ...ons 4 4 1 Exchanging the stages when different stages are ordered The instrument will be delivered with one stage built into the instrument To exchange the stage please proceed as follows 1 Open the flange and swivel the stage in its horizontal position 2 Retract and unhinge the flap damper ...

Page 61: ...07 17 3 Disconnect the plug The plug is equipped with a locking mechanism Please do not pull on the cable Grasp the knurled part of the plug and retract for disconnecting the cable 4 Slide the preventer until the bearing is completely visible ...

Page 62: ... complete stage to the left 6 Turn the stage 90 and withdraw it in the vertical direction 7 Place the stage into the designated storage box This is used to protect the flange surface from scratches which might influence the sealing and evacuating the chamber ...

Page 63: ...Page 59 Leica EM TIC 3X Operating Manual 07 17 8 Insert the other stage in the vertical position 9 Hinge the stage on its two bearings ...

Page 64: ...M TIC 3X Operating Manual 07 17 10 Slide the preventer to cover the bearing completely before you make any other connections 11 Swivel the stage in its horizontal position slightly retract the flap damper and hinge it ...

Page 65: ...ched on during the stage exchange select Menu followed by Setup and initialize the stage Initialization must be performed every time the stage or the light has been exchanged if the instrument is switched on When the instrument is switched off the stage or light will be initialized when switching on the instrument ...

Page 66: ...the instrument with the mains switch rear side the system starts initialization Switching on the instrument Initialization screen after switching on the instrument Layout of the user interface Status field Command line Parameter input line sample information guns status field illumination ...

Page 67: ...an be changed for each gun individually using the arrow buttons The optimum source current for the selected voltage is set automatically by changing the voltage value However the current could be automatically tuned by the software at different values as well This could be necessary to stabilize the guns at low kV settings if gun lifetime is more than 100 hours Each gun can be disabled or enabled ...

Page 68: ...low in progress to green When the cutting process has started with a set voltage higher than 8 kV the cutting voltage is increased from 8 kV in increments of 0 5 kV until the voltage entered is reached The dwell time for each voltage increment depends on the stability of the ion source If the source current is within the tolerance range of the set point for 20 s the voltage is increased by 0 5 kV ...

Page 69: ...Furthermore the sample or the guns can be edited by pushing into the desired field of selected step line Delete the selected step can be removed As soon as the recipe consists of more than one step the sign in the Load Up line will change to a multiple step indication The amount of steps is indicated in the sample information line e g 1 sample 3 steps The last program is active for the next sample...

Page 70: ...rs can be set differently for each step A star symbol beside the values kV mA Time in the parameter input line appears when selecting different gun parameters The progress of the recipe can be recalled by pushing the Load Up line yellow sign in process green finished process ...

Page 71: ...anage The existing recipe can be up loaded to a USB data stick or a recipe from the data stick can be down loaded to the instrument There is no database available in the instrument Hence different recipes can only be selected from the USB data stick ...

Page 72: ...e auto purge and restart procedure the following message will be displayed One time auto purge and process restart executed Auto Current Tuning The TIC 3X ion source has certain couples of voltage and current for stable operation Optimal current values will be set and displayed automatically for each voltage and can be changed manually However depending on the ion source s age and contamination th...

Page 73: ...y switches off after 12 minutes Pushing the Observe button the light will be switched on and the shutter will be opened in order to observe the sample during the process The shutter will be automatically closed and the light goes off after one minute during sample processing For long term observation the process can be paused guns not active by pushing the pause symbol This feature is used to avoi...

Page 74: ...d To avoid humidity inside the chamber the chamber should be kept under vacuum even when the system is not in use Please press Pump even when no further sample needs to be processed You may switch off the mains switch when a long break is expected longer than three months The vacuum is kept at a certain level In order to prevent the surfaces becoming contaminated during venting and particularly wh...

Page 75: ...conjunction with the cooling stage 6 LN2 level of the Dewar in conjunction with the cooling stage 7 Vacuum value Purge After installing the instrument replacing the Argon bottle or in case of unstable guns the Argon lines and the valves should be purged Purging can only be done when the working vacuum is reached Press the Start button to perform the purging process After pushing the button purging...

Page 76: ...File Upload As soon as a USB data stick is connected the existing recipe process parameter as well as reports for service call can be uploaded onto the data stick By uploading the existing recipe it can be stored as a xls file On the USB stick a folder is created TICexport open the folder and open the file process rcp Import this file by using the stylesheet TIC3X xsl It might be necessary to chan...

Page 77: ...d when stage or light has been exchanged when the system was switched on For calibration of the screen use stylus to press within the calibration point Calibration is not recommended unless absolutely necessary Service button in the Menu is used to enter in the service menu The service menu is password protected and can only be entered by an authorized Leica service engineer ...

Page 78: ...measures during maintenance and service Caution Danger may be caused by servicing and cleaning the system incorrectly This may cause personal injury and damage to the system Maintenance operations on the Leica EM TIC 3X Triple Ion Beam Cutter system must not be performed except by the specially trained administrator or a technician designated by the manufacturer 5 3 General instructions for mainte...

Page 79: ...tandby 5 6 Components requiring maintenance 5 6 1 View port Due to the image quality when the high magnification stereo microscope 230x is used the instrument is delivered with a viewing port consisting of an optical grade window without protective glass which would influence the image quality However when a low magnification stereo microscope 77x is used a protective glass optional can be inserte...

Page 80: ...he cover flange on a clean underlay with the inside facing upwards Caution There is a danger of damaging or contaminating the sealing face on the inside of the cover flange Parts of the interior of the cover flange serve as a sealing face The system particularly the vacuum system vacuum leak may be damaged Protect the entire inside surface from scratches or dirt Always place the cover flange on a ...

Page 81: ... g the screwdriver included in the delivery to carefully release the snap ring Insert the tool in the groove and carefully lever the snap ring out Releasing the snap ring 4 Store the snap ring in a clean safe place Removing the snap ring Groove Snap ring Released snap ring ...

Page 82: ... 5 Use a pointed object e g the screwdriver included in the delivery to carefully pry out the protective glass Insert the tool in the groove Carefully lift out the protective glass Protective glass has been removed Groove Protective glass View port ...

Page 83: ...w protective glass if required 8 Refit the snap ring Fitting the snap ring Replacing the optical grade viewing glass Open all eight hex screws to exchange the optical window Please make sure the sealing ring is well positioned when mounting the window fitting again Carefully squeeze the snap ring together and insert ...

Page 84: ...ng Manual 07 17 5 6 2 Triple ion source 5 6 2 1 Assembly Parts of the ion source cartridge 1 Front Side Cathode 2 Front Side Wehnelt Cylinder 3 Ceramic Isolators 4 Anode 5 Rear Side Wehnelt Cylinder 6 Rear Side Cathode 1 2 3 4 3 5 6 ...

Page 85: ...s only The lifetime of cathodes is limited because of the structure and physics of the saddle field configuration Due to permanent abrasion sputtering of cathode material they will worn out after time of use Depending on the used beam energy the lifetime of aluminium cathodes is approx 350 hours at 8 kV Depending on the process parameter e g voltage process time and the environment e g Ar purity v...

Page 86: ...essage appears After confirming the warning is still present in background indicated by a symbol in the taskbar By pressing the symbol the warning message can be re opened The warning message and symbol will be deleted after reset of ion source operation hour counter Operation times 350 hours will be displayed red in the operation hour counter Ion source operation hour counter Do not use ion sourc...

Page 87: ...uipped Triple Ion Source hence the instrument will be ready to use within 10 minutes by exchanging the complete Triple Ion Source component Following parts should be checked respectively replaced or cleaned Assembly Task Cycle Ion Source components of the cartridge system Replace cathodes and anode or replace complete ion source cartridge 15min downtime 350 h as indicated by operating hours counte...

Page 88: ...ion There is a danger due to high temperatures 65 C around the ion source during operation Personal injury e g burns may occur You must wait until the ion source has cooled down sufficiently before beginning any work on it To dismantle the ion source form the system proceed as follows 1 Swivel the microscope aside 2 Remove the cover flange as described in chapter 5 6 2 6 Cover flange removed 3 Uns...

Page 89: ... To reinstall the ion source carry out the steps above in the reverse order Make sure screws with the center hole are used for tightening the ion source Remove blow with oil and water free air loose particles from the recess Make sure that no loose particles are into the recess of the HV connection area red circles Center post Contact spring for high voltage ...

Page 90: ...ust dirt etc The ion source may malfunction due to contamination Protective gloves must be worn for all work carried out on ion source components All work must be carried out in a clean dust free environment Disassembling the ion source 1 Unscrew the screws on an ion source and remove the spring with tweezers Place the parts on a clean underlay Hex screwdriver size 1 5 ...

Page 91: ...e source components on a clean underlay in the order in which they were removed 4 Repeat for the other sources Internal construction of the ion source cartridge 1 Front Side Cathode 2 Front Side Wehnelt Cylinder 3 Ceramic Isolators 4 Anode 5 Rear Side Wehnelt Cylinder 6 Rear Side Cathode 1 2 3 4 3 5 6 ...

Page 92: ...8 Exchange of the complete ion source Unpack ion source cartridge of the sealed bag using scissors Insert cartridges in the ion source housing Check the right assembling The edge of rear side cathode must be 1 mm lower than the edge of ion source housing ...

Page 93: ...Orient the gas inlet holes in line with the thread holes of the holding spring while inserting the cartridge Lock parts with holding spring and screws Unscrew and remove locking screw and insert ion source housing in the instrument To reinstall the ion source carry out the steps 5 6 2 6 in the reverse order Reset the operation hour counter of the ion source ...

Page 94: ...ne solution Danger of alkali burn Protect skin and eyes 5 Residual contamination of the Wehnelt cylinder can be removed by using sandblasting if available or sandpaper or similar 6 Clean all steel parts Wehnelt cylinders with isopropanol in an ultrasonic bath for 10 minutes 7 Clean the cathode with isopropanol in an ultrasonic bath for 10 minutes or replace it 8 Clean the ceramic components with i...

Page 95: ...rating Manual 07 17 Assembling the ion source 1 Assembly all components of the ion source Groove of the anode must point to the front cathode Components should solidly seat to its rest Front Cathode Insulator Anode groove Wehnelt ...

Page 96: ...ole of the ion source gun housing by holding the housing in upright position Make sure that the ion source components are firmly kept together 3 Turn gun housing in vertical position and check if gas inlet holes are visible Turn ion source 120 to set gas inlet holes in correct position ...

Page 97: ...Leica EM TIC 3X Operating Manual 07 17 4 Check the right assembling The edge of the rear side cathode must be 1 mm lower than the edge of the ion source housing 5 Fit the spring on the mounted ion source Spring ...

Page 98: ...all the other two ion sources Follow steps 1 6 of the procedure described above The diameter tolerances of the gun parts are small Hence inserting the gun parts must be done carefully to avoid the parts getting jammed Once the gun is assembled check the correct fitting by shaking the gun There must be no rattling noise audible ...

Page 99: ...e achieved by manual adaption of the current to 3 mA Since the adaption of the current is related to the current between anode and cathode the ion current will be not influence Hence sample temperature will not increase 5 6 3 Exchanging fuses If a fuse needs to be replaced fuse faulty particularly if it fails repeatedly try to discover the reason for the failure of the fuse If necessary contact th...

Page 100: ...nts or 50 ethanol 5 8 Maintenance schedule summary Assembly Task Cycle Viewing glass Clean or replace As necessary Protective glass Clean or replace As necessary Ion source Replace cathodes and anode or complete ion source cartridges 350 h as indicated by operating hours counter Clean components of the ion source 350 h Clean the ion source If ion source is unstable In the event of short circuit Tu...

Page 101: ...Replace fuse Malfunction Turbo pump does not reach setpoint speed Cause Vacuum leak Remedy Check for leak first at the door and cover flange Check the gas line connection Malfunction Coaxial light can t be switched by the touch screen Cause It is only possible when a process is running Remedy Switching without processing can only be done directly on the coaxial light Malfunction Ion guns unstable ...

Page 102: ... other replacement parts Caution There is danger due to overloaded or defective components This may cause personal injury and damage to the system The environmental conditions that were agreed contractually and determined at the time of installation must be maintained The manufacturer will not accept liability for damage caused by misuse of the system or its use for purposes other than the intende...

Page 103: ...n der Richtlinie conformément aux dispositions de directive Electromagnetic compatibility Elektromagnetische Verträglichkeit 2014 30EU Low Voltage Equipment Niederspannungsrichtlinie 2014 35EU RoHS directive RoHS Richtlinie 2011 65 EU declares in exclusive responsibility that the product erklärt in alleiniger Verantwortung dass das Produkt déclare sous sa responsabilité que le produit Model Modell...

Page 104: ...Leica Mikrosysteme GmbH Vienna Austria T 43 1 486 8050 0 F 43 1 486 8050 30 www leica microsystems com CONNECT WITH US ...

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