Page 18 Leica EM TIC 3X Operating Manual 07/17
3.
Installation and set up
3.1
Transportation and storage conditions
The Leica EM TIC 3X Triple Ion Beam Cutter system is delivered properly packed
and in the semi-assembled state. The customer must check the condition of the
system upon delivery and file a damage report with the shipping company if the
equipment is damaged. The customer must immediately inform the Leica
representative of any possible damage in transit.
The system must be positioned upright for transporting.
The overall weight including packaging is approx. 90 kg.
The packed equipment must be stored in clean, dry areas at temperatures between
5° and 40 °C. It must not be exposed to aggressive or corrosive substances.
3.2
Installation requirements
3.2.1 Working area conditions
A working area of about 150 mm must be maintained all around the system, to allow
the supply connections to be made, and also to enable access for essential servicing
activities. The Leica TIC 3X must be set up on a stable laboratory workbench with a
surface area of at least 800 mm x 900 mm.
When selecting a setup location, bear in mind that the system weighs approx. 62 kg.
The instrument has to be placed on a stable laboratory workbench or other
stable instrument table; otherwise vibrations from the roughing pump can be
transferred to the system via the instability of the table, which effects vibration
free observation during the ion etching process.
The instrument must be placed on the bench in such a manner to get access to
the switch and mains plug at any time!
3.2.2 Connections requirements
The following connections must be assured:
Electricity supply:
100
– 230 V, 50/60 Hz
Argon:
reduced pressure:
200-800 mbar (overpressure)
purity:
min. 99.999 % (Ar 5.0)
