Page 90 Leica EM TIC 3X Operating Manual 07/17
5.6.2.9 Cleaning the ion source components
In case of an error message asking for cleaning ion source proceed as following:
1. Disassemble ion source as described in chapter 5.6.2.7
2. Check the source components for dirt. Discoloration of steel parts, which is
caused by high temperatures, will not impair the function of the ion source.
3. Replace worn cathodes and anode once the operation hours exceeds 350 h.
4. Remove dust and dirt particles from the Wehnelt cylinders with a wooden stick
and with pressurized air containing no oil or water. Or (recommended) use
potassium- or sodium- hydroxide under the fume hood over night or at least
as long as no more hydrogen gas formation is observed.
Attention: Alkaline solution! Danger of alkali burn. Protect
skin and eyes!
5. Residual contamination of the Wehnelt cylinder can be removed by using
sandblasting (if available) or sandpaper or similar.
6. Clean all steel parts (Wehnelt cylinders) with isopropanol in an ultrasonic bath
for 10 minutes.
7. Clean the cathode with isopropanol in an ultrasonic bath for 10 minutes or
replace it.
8. Clean the ceramic components with isopropanol but
not
in the ultrasonic
bath. To remove soiling in the pores of the material, heat them for at least 1
hour at min. 800 °C.
9. Clean the source body with isopropanol in an ultrasonic bath.
10. Heat all cleaned parts for about an hour in an oven at a temperature of 400°C
to evaporate any remaining isopropanol residue.
If the contaminations are not completely removed, means residual particles or
layers are left on the gun parts; the next maintenance cycle will be shorter. The
guns will be contaminated earlier than complete cleaned or new guns.
