Scanning Electron Microscope
EM-30PLUS Operating Manual
32
Low Vacuum Delay
It sets the Delay time required for the vacuum degree to reach up to the stable degree of
10
-1
~10
-2
torr when operating Low Vacuum Mode (Optional).
The value of Low Vacuum Delay may vary for the conditions(water content etc.) of
specimens.
It is 180 for the basic solid specimen.
For the details on Low Vacuum Mode, see [5.8 LV Mode].
Others (Calibration part)
The right part on the Setup page is the function on Calibration. Arbitrary operation is
prohibited.