Scanning Electron Microscope
EM-30PLUS Operating Manual
21
Stage information
Names
Explanations
Home
When pressing button, Stage moves to the location of X=0, Y=0
coordinate.
Center
Move Stage to the center of the chamber. When pressing button,
Stage moves to the location of X=17.5, Y=17.5 coordinate.
(The maximum moving distance of Stage is X=35mm and Y=35mm)
Mini-Map
It is a button used to find the location of the specimen easily.
When pressing button, images are captured in the minimum
magnification that can take photos in the focal distance set currently,
whose current location is indicated.
Stage
Coordinate
X-axis: Horizontal direction inside the chamber
Y-axis: Vertical direction inside the chamber
T-axis: Tilt angle of Stage. When entering the angle in the
coordinate window, Stage moves. (0~45 degrees)
To prevent OL from colliding with specimen when T-axis is rotating, the maximum tilt
angle is automatically limited below 45
degrees
depending on the height of stub and X,
Y coordinate.
To use a higher tilt angle, use a lower stub and set X and Y near by the center.
2.5.1 Maximum Tilt Angle
(See Height of Sample in 2.7 Setup for the maximum tilt angle.)
Holder information
Holder Type 1
8mm 7 Stubs can be mounted. The location of
specimen can be identified easily using the
navigation function. Height of stub=42.5mm
Holder Type 2
N.A.(Being developed.)
Holder Type -
None
When using all other holders except Holder Type 1 and 2, the
navigation function is not available.
