Scanning Electron Microscope
EM-30PLUS Operating Manual
62
4) Confirm the position of the sample to be measured in low magnification, and move to
the position you want using Mouse or Joy Stick and execute measurement in the
magnification you want.
See [4.3.4 Adjustment of minimum magnification], and
[4.3.5 Specimen Selection and Moving using Mouse].
4.3.3 Use of Tilt Function
You can change the angle to observe specimens. If you tilt the angle, the upper/side
information of the specimens can be observed together.
Because the electron microscope basically sees specimens using secondary electron, it is
very hard to observe the specimen without bumps like a thin film below 30nm.
In this case,
you can observe the image if you tilt the specimen to about 10~15° as the amount of
secondary electron generated on the surface of the specimen increases.
Tilt = 0°
Tilt = 45°
