Scanning Electron Microscope
EM-30PLUS Operating Manual
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6.2.4 Aperture Alignment (Resetting)
If images move up and down or left and right during Coarse Focus and Fine Focus
operation, carry out the Wobble operation. If images move too far towards one of X, Y axis
during Wobble operation, it gets out of aperture hole.
If you cannot adjust focus even when you turn aperture knob to X, Y axis little by little,
carry out the aperture alignment.
1. X axis Alignment
Turn the X axis knob, and make the length of A and B groove same.
2. Y axis Alignment
Check if image is on the screen while turning the Y axis knob clockwise completely and
releasing it 4~6 rounds counter-clockwise.
(6 Rounds: 30 um aperture hole position)
※ The position of Y axis alignment can vary depending on equipment. Check it while
watching the monitor.
3. Adjusting Focus
Adjust the focus finely by controlling
Coarse Focus and Fine Focus.
