Scanning Electron Microscope
EM-30PLUS Operating Manual
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11) Find out the position where image gets brightest by dragging X, Y axis in Gun
Alignment box of NS or adjusting mouse wheel.
Center: If you press [X, Y] button, X, Y axis moves to the right center.
(As the position of center does not necessarily mean the optimum state of e-gun, carry
out Fine Adjustment again after moving it to the center.)
After e-gun alignment of hardware, be sure to carry out gun alignment in NS
.
When using with Gun align biased excessively, it can be hard on equipment
.
12) Find out the location of e-gun and then start Filament optimization operation.
(See [4.2.2 Filament Optimization].)
(Before Filament Optimization)
(After Filament Optimization)