COXEM EM-30PLUS, Instructions Manual

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Scanning Electron Microscope EM-30PLUS Operating Manual
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5.1.1 RED & Focus Mode .................................................................................................................................. 70
5.1.2 Fast Mode ...................................................................................................................................................... 70
5.1.3 Slow Mode .................................................................................................................................................... 71
5.1.4 Photo Mode ................................................................................................................................................. 71
5.2 Setting Acceleration Voltage ................................................................................................... 72
5.2.1 Summary of Acceleration Voltage ..................................................................................................... 72
5.2.2 Setting Acceleration Voltage ................................................................................................................ 76
5.3 Setting Observation Magnification/Spot size ...................................................................... 78
5.3.1 Methods for Magnification Selection ............................................................................................... 79
5.3.2 Setting Spot size ........................................................................................................................................ 80
5.4 Focus Adjustment ...................................................................................................................... 81
5.4.1 Focus Setting ............................................................................................................................................... 83
5.5 Fine Movement of Images ....................................................................................................... 89
5.5.1 Use of Image Shift .................................................................................................................................... 89
5.5.2 Use of Beam Rotation .............................................................................................................................. 90
5.6 Control of Contrast and Brightness ....................................................................................... 91
5.6.1 Control of Contrast/Brightness ............................................................................................................ 91
5.7 BSE Mode .................................................................................................................................... 92
5.7.1 Precautions for Using BSE Sensor ...................................................................................................... 93
5.7.2 BSE Setting .................................................................................................................................................... 94
5.7.3 Directions for BSE Mode ........................................................................................................................ 94
5.8 LV Mode (Low Vacuum Mode) - Optional ................................................................................ 98
6 Wobble Operation for Aperture .......................................................................... 100
6.1 Structure of Aperture ............................................................................................................. 100
6.2 Wobble (Procedure of Aperture Alignment) ..................................................................... 101
6.2.1 Wobble Operation 1 .............................................................................................................................. 102
6.2.2 Wobble Operation 2 .............................................................................................................................. 106
6.2.3 Methods for Aperture Setting .......................................................................................................... 110
6.2.4 Aperture Alignment (Resetting) ....................................................................................................... 112
7 Image Save ............................................................................................................... 113
7.1 Management of Image Information ................................................................................... 113
7.2 Use of Image Tools ................................................................................................................. 114
7.2.1 Addition of Figures ................................................................................................................................ 114
7.3 Image Save Function .............................................................................................................. 120
7.3.1 Image Save ................................................................................................................................................ 120