Scanning Electron Microscope
EM-30PLUS Operating Manual
106
6.2.2
Wobble Operation 2
: When aperture is completely out of the electron beam path and images are not shown on
the screen.
When there are no images on the screen while you observe the images, carry out the
alignment according to the following procedures.
The following operations are carried out under the premise that filament is aligned.
If f
ilament is not aligned properly, image quality can decrease or no images are
shown
.
First check if filament is aligned properly before conducting aperture
adjustment operation
.
(For operational procedure of filament alignment, see the maintenance manual
[3.4.2 Procedures for Filament Replacement].)
1st operation: E-gun alignment
2nd operation: Aperture resetting
3rd operation: Wobble operation
1) Check if there are no images at all on the screen.
Check it while changing Contrast and Brightness
Check it while changing Spot size from 5 to 16