Scanning Electron Microscope
EM-30PLUS Operating Manual
122
8.2 Method for E-Gun Alignment
When images do not appear properly, or after replacing filament or changing variable
voltage, e-gun alignment should be done.
The process of e-gun alignment is as follows.
1) Set the vacuum state by mounting the specimen in chamber and clicking [Vacuum OFF]
button.
2) Turn on the electron beam when vacuum degree reaches.
3) Set the filament value almost as maximum.
4) Set the Spot size as 16 which is the maximum value.
5) Move the electron beam to the center by pressing [X, Y] in Alignment tap on the right of
screen.
