COXEM EM-30PLUS, Instructions Manual

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Scanning Electron Microscope EM-30PLUS Operating Manual
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1.3.3 Safety Precautions
The precautions you should know before using EM-30PLUS are as follows.
Items Descriptions
WARNING
If the instructions were not followed, it can cause severe injuries or
death of users.
CAUTIONS
If the instructions were not followed, users can be injured or suffer
property damage.
WARNING

Since e-gun part is in the state of high acceleration voltage, touching with hands
without wearing any safety device causes electric shock or burn. Make sure you do not
connect or disconnect the cables during the operation.

Do not touch the e-gun that is turned on with hands. When malfunction appears in e-
gun, please apply for the service.

When electric cables get mechanical pressure, electric shock or fire can be occurred.
Never pull, bend or twist the cables.

When the chamber of e-gun falls off due to loosen clamping screw, it can cause injuries.
Be sure to fasten the screw of e-gun alignment tightly before opening the chamber of
e-gun.

If you touch the hot surface of cartridge of electron gun with hands, you can have a
burn. Do not touch the cartridge with hands until the surface cools completely.
CAUTIONS

If the product is exposed to excessively high temperature or its heating is too high, it
can be the causes of defects or malfunction. Please maintain a proper indoor
environment so as to prevent breakdown(Normal operation environment: temperature
20±5°C, humidity below 70%)

If the product is stored in excessively low temperature, the oil viscosity of Rotary Pump
may change greatly and affect the vacuum performance of equipment and the
electronic parts inside the board. Be sure to keep the product above the optimum
temperature. (Normal operating temperature 20±5°C)

Do not install or store the product in a place where excessive vibration can occur on
the floor. (Recommended vibration level below 35dB, below 50dB is OK for medium or
low magnification below 50K)

When the rotary pump of product operates, its surface temperature rises. Fire can break
out due to rotary pump at a high heat. Be sure not to place ignitable or combustible