Scanning Electron Microscope
EM-30PLUS Operating Manual
87
8) Adjust using fine focus and find the optimal image.
9) When correcting focus again, adjust in the order of [Astig - Fine Focus - Astig - Fine
Focus].
10) Set the magnification of images you want.
When you set focus, it is recommended to start higher magnification than observing
magnification and then lower it as you want.
If you moved Stage location after finishing focus setting, correct the focus from the
first. In this case, focus should be set again as it got out of focus due to the changed
specimen location while Stage was moving.
When you observe a specimen in a position for a long time, the specimens are subject to
thermal damage.
