Scanning Electron Microscope
EM-30PLUS Operating Manual
74
Occurrence of Thermal Damage according to Acceleration Voltage
As acceleration voltage gets higher, thermal energy of electron beam increases, which
causes thermal damage and specimen images can be distorted.
Acceleration voltage 10kV magnification
5K
Acceleration voltage 10kV magnification
10K
acceleration voltage 30kV magnification
5K
acceleration voltage 30kV magnification
10K
In order to prevent specimen damage, decrease the value of acceleration voltage, Spot
size of electron beam and scanning time as well. Moreover, adjusting coating thickness
for pretreatment can prevent specimen damage, which causes reduced image distortion.