Scanning Electron Microscope
EM-30PLUS Operating Manual
52
3) Tighten the clamping screws of specimen mounting portion at the bottom of Stage so
that Multi Holder may not move. At this time, tighten the screw on the right.
There are two screws mounted on both sides of Stage.
Be sure not to operate the screw on the left as it is for grounding.
When fixing Stub, be sure to tighten and fix the screw on the right only.
If Stub is not fixed properly, mechanical vibration can appear in images. Therefore,
confirm the fixed state.
4) Close the chamber door of specimen mounting portion by pressing it.
Close the chamber door by pressing it and adhere Stage firmly to the Chamber.
If you leave the chamber door unclosed for a long time after Pump, the rotary pump is
operated in air pressure, which applies pressure to the pump and causes failure.
Be sure that the chamber door is closed when you Pump with the chamber. (Confirm LED
on the front of equipment)
5) Change to vacuum state by pressing [Vacuum OFF] button of NS.