Scanning Electron Microscope
EM-30PLUS Operating Manual
88
Automatic Focus Setting
In order to focus automatically, press the [
] button in [Focus] box.
Automatic focusing can find the images at the level of coarse focus automatically.
Automatic focusing is not accurate as manual focusing.
For more accurate focusing, manual focusing is recommended.
In the situations below, the image may not be in focus when using Auto Focus function.
when there is a big difference in the current value of focus and the value of the actual
focus of the sample,
when the image is not on the Focus Mode screen while executing Auto Focus
function(high magnification) or the surface is smooth without a big difference in
brightness
Correct Auto Focus area
Incorrect Auto Focus area
Example of Focus Setting
Before focus
Focus
After focus
When images are not clear as focus has not been adjusted exactly, even after you
adjusted aperture, wobbling operation is necessary.
For the details of wobble operation, see [6. Aperture Alignment].