Zeiss GeminiSEM Series, Инструкция по эксплуатации

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3 Product and Functional Description | 3.2 Main Components ZEISS
3.2.7.5 Chamber CCD Camera
Purpose The microscope contains a CCD camera (charge-coupled device camera) inside the specimen
chamber. It is referred to as the chamber CCD camera or chamberscope. It allows you to monitor
the position of the specimen stage and particularly the distance between the objective lens and
the specimen holder.
Position The chamber CCD camera is located at the backside of the specimen chamber.
1
2
Fig. 19: Sample image from chamber CCD camera.
1 Objective lens 2 Specimen holder
NOTICE
Risk of collision
Use the chamber CCD camera to monitor the position of the specimen holder during stage
movements. Pay particular attention to the distance between the objective lens and the top of
the specimen. This applies to vertical movements, but also to horizontal movements, because a
thick specimen may collide with the objective lens from the side.
Depending on the selected detector, the chamber CCD camera is capable of acquiring black-and-
white images or colored images.
The performance of the diode detectors is negatively effected by the illumination that is required
for the camera. If a diode detector, like aSTEM, aBSD/aBSD-LH or AsB, is selected, then by default
the chamber CCD camera is disabled:
Fig. 20: Chamber CCD camera disabled as indicated by a pause sign (e.g. if a diode detector is
selected).
3.2.8 Specimen Stage
Purpose The motorized eucentric specimen stage is used to navigate the specimen inside the specimen
chamber.
44 Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000