Zeiss GeminiSEM Series, Инструкция по эксплуатации

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ZEISS 7 Troubleshooting | 7.2 Chamber
7.2 Chamber
7.2.1 Initializing the Stage
If a stored stage position cannot be approached or if the stage does not move or does not move
accurately, the stage needs to be initialized.
CAUTION
Moving the specimen stage
Fingers can be trapped by the moving specimen stage.
4
Always close the chamber door before moving the specimen stage.
4
To remove parts fallen into or near to the stage use a tool (e.g. tweezers) instead of your
fingers.
Prerequisite
ü
The specimen chamber has been evacuated, refer to Loading the Specimen Chamber [
}
76]
ü Requires the Stage Initialise privilege
ü
If there are any large specimens inside the chamber, remove them before initializing
Procedure 1. From the Menu Bar , select Stage > Stage Initialise .
à The Initialise Stage window is displayed.
2. Confirm via Yes .
à
The stage initialization process takes a few minutes.
à
INFO: If initialization of the stage does not solve the stage problem, contact your local
ZEISS service representative.
7.2.2 Defining the Post Initialization Position of the Stage
You can configure the position to which the stage drives after the initialization procedure. Other-
wise, the stage drives to the center position.
CAUTION
Moving the specimen stage
Fingers can be trapped by the moving specimen stage.
4
Always close the chamber door before moving the specimen stage.
4
To remove parts fallen into or near to the stage use a tool (e.g. tweezers) instead of your
fingers.
Prerequisite
ü Requires the Supervisor privilege.
Procedure 1. From the Windows start menu, select SmartSEM > SmartSEM Administrator .
à
The SmartSEM Administrator Log on window is displayed.
2. Enter user name and password.
3. To confirm, click
OK .
à The SmartSEM Administrator window is displayed showing the user list.
4. Click Column/Stage .
5. In the Stage Post Initialisation Position input fields, enter the desired position.
Alternatively, use the dual joystick to navigate to the desired position and click Set to cur-
rent position .
6. To activate the function, activate the Post Init. Posn Valid checkbox.
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 119