Zeiss GeminiSEM Series, Инструкция по эксплуатации

Страница: 27 / 164

ZEISS 3 Product and Functional Description | 3.1 System Overview
Optional
Components and
Accessories
1
2
4
3
6
7
8
9
10
11
5
Fig. 9: Optional components and accessories
1 WDS for highest sensitivity chemical
analysis 2 Local charge compensator for SEM
imaging and analysis of non-conductive
specimens
Refer to the instruction manual Charge
Compensator
3 EDS for chemical analysis 4 Annular STEM detector (aSTEM) for
transmission imaging and quality con-
trol
Refer to aSTEM Detector [
}
58]
5 C2D Detector
Refer to C2D Detector [
}
46]
6 Single needle GIS for high angle speci-
men access
Refer to the instruction manual Single
GIS
7 Manipulators for specimen modification
and probing 8 BSD detector for high efficiency and an-
gle selective material characterization.
Detection of up to 4 channels in parallel
possible
Refer to aBSD-LH Detector [
}
49] and
aBSD Detector [
}
52]
9 Airlock solution (80 mm or 200 mm
wide) for fast and efficient specimen
transfer and fast pumping times
Refer to the respective instruction man-
ual 80-mm Airlock or 200-mm Airlock
10 EBSD for crystallographic mapping
11 Control panel
Refer to Control Panel [
}
60]
Further options:
§
Nanopatterning and Visualization Engine (ATLAS) for advanced patterning and lithography
tasks
Information will be provided by the manufacturer
§
Plasma Cleaner
Refer to the instruction manual Plasma Cleaner
§
Electrostatic Beam Blanker for SEM
Refer to the instruction manual Beam Blanker
§ Further options on request
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 27