Zeiss GeminiSEM Series, Инструкция по эксплуатации

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ZEISS 5 Commissioning and First Operating Steps | 5.4 Acquiring an Image
5.4.7 Optimizing the Image
Once you have generated an initial image, you can adjust various parameters to optimize the im-
age.
Info
The following procedure describes the best way to quickly optimize the image without the
control panel. You can also use the control panel to adjust aperture alignment, magnification/
focus and brightness/contrast.
The procedure consists of the following steps:
§
Adjusting the Magnification [
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§ Moving the Field of View at High Magnifications [
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§
Limiting the Scan Field [
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Aligning the Aperture [
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Selecting the Scan Speed [
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Correcting Astigmatism [
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5.4.7.1 Adjusting the Magnification
Procedure
1. To switch to the Fine mode, in the Status Bar , click .
à
The button changes to .
2. Step by step, raise the magnification up to Mag 50,000 x and focus in between.
To adjust the magnification and the focus, hold down the left mouse button or the mouse
wheel, respectively, and drag the mouse within the
Image Area .
5.4.7.2 Moving the Field of View at High Magnifications
If you want to move the field of view at high magnifications, use the Beam Shift function instead
of moving the stage.
Procedure 1. In the GeminiSEM Control panel, select the Control tab.
2. In the
Alignment section, click Beam Offset.
3. To shift the beam, in the Beam Offset naviga-
tion box, use the scroll bars or the red marker.
5.4.7.3 Limiting the Scan Field
Prerequisite ü Adjusting the size and position of the small frame (reduced raster) requires the license RE-
DUCED.
Procedure
1. In the Toolbar , click the Reduced Raster/Column Control icon.
à
A small scan frame is displayed. This frame defines the specimen area to be scanned by
the electron beam.
à The image outside the scan frame is frozen.
2. To change the position of the scan frame, click on the green border line and use the mouse
to drag and drop the frame.
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000 83