ZEISS
3 Product and Functional Description | 3.3 Optional Components and Accessories
The magnification in the example can only be set for GeminiSEM 360/460. The lowest magnifica-
tion for GeminiSEM 560 is somewhat higher.
The central hole is laser cut. As a result of this process, there is some silicon that beads up in areas
near the hole, but this silicon is conducting. It is therefore not charging up and not disturbing
your image quality.
NOTICE
Short working distance
When inserted, the aBSD/aBSD-LH detector is positioned directly underneath the objective
lens. The lower edge of the detector is then located at a working distance of 1.5 mm. If you
move the specimen to a working distance below 1.5 mm, then you damage the aBSD/aBSD-LH
detector.
4
Do not move the specimen to working distances below 2 mm.
4
Be careful when you tilt the specimen.
Depending on which port the aBSD/aBSD-LH detector is mounted, the stage could hit the
supporting arm of the detector far away from the sample. This is especially true if the de-
tector is mounted right hand side of the chamber.
3.3.1.7 YAG BSD Detector
Purpose
The YAG BSD detector is a scintillation type detector for backscattered electrons.
The YAG BSD detector has a high sensitivity and is specifically designed for high speed imaging.
It can be used in HV mode and in VP mode.
Function
The YAG BSD detector uses yttrium aluminum garnet (YAG) as a fast scintillation material that is
mechanically and chemically resistant. Since it is a scintillation type detector, the YAG BSD detec-
tor does not have segments with changeable polarity and you can only use this detector for com-
position imaging. In comparison to segment based BSD detectors, the YAG BSD detector has a
faster response time.
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000
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