ZEISS
9 Technical Data and Conformity | 9.4 Performance Data and Specifications | GeminiSEM 560
Parameter
Value
Circuit breaker (at house installation)
25 A (type K) according to IEC EN 60898
Circuit breaker type
Type K
Residual Current Device (RCD)
100 mA according to IEC EN 60898
Ampere interrupting capacity (AIC)
1500 A rms without external EMO box
10000 A rms with external EMO box
Max. leakage current (relevant for Residual
Current Device)
15 mA at 208–230 VAC (without further op-
tions which need 230 V supply)
Short Circuit Current Ratio (SCCR)
3.5 kA
Protection class
Class I
Overvoltage Category
II
Electron Optics
Parameter
Description
Acceleration volt-
age
Range:
20 V to 30 kV
Adjustment:
Continuously variable in 10 Volt steps
Probe current
20 nA high resolution configuration:
3 pA to 20 nA
100 nA high current configuration:
6 pA to 100 nA
Stability:
Better than 0.2 % per hour
Probe current selection
via seven apertures (six apertures in case of
100 nA configuration) with electromagnetic selection and precise
alignment
Optional OptiProbe
module for continuous probe current adjust-
ment
Magnification
Range:
1x* – 2,000,000x referenced to Polaroid 5" × 4.5" image for-
mat
* in Standard Overview Mode
Electron source
Filament:
Schottky field emitter
Automatic emitter run-up:
Safe controlled run-up to the target
emitter conditions
Objective lens
Type:
Gemini electromagnetic/electrostatic nano-twin objective lens
system (80º conical final lens) with water cooling for best thermal sta-
bility and reproducibility
Focus
Working distance:
Range from 0.1 mm to 50 mm, depending on
operating conditions
Focus compensation:
Automatic compensation to minimize focus
changes over the entire acceleration voltage range
Dynamic focus:
For correction of focus on tilted specimens
Focus wobble:
For assistance in aperture alignment, with adjustable
amplitude and speed
Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000
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