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< 11. Inspection and Maintenance >
11-7
IM 11M12D01-01E
11.3.4 Replacement of the Heater Unit
This Subsection describes the replacement procedure for the heater unit.
The sensor or ceramic heater-furnace core internal structure is subject to fracturing, so do NOT
subject it to strong vibrations or shock. Additionally, the heater unit reaches high temperatures and is
subjected to high voltages. So, maintenance services should be performed after the power is off and
the heater unit temperature has returned to normal room temperature.
For details, refer to IM11M12A01-21E “ Heater Assembly ”.
NOTE
If the heater strut assembly cannot be removed because a screw has fused to its thread, one of our
service representatives can fix it.
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