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<3. Installation, Wiring, Optical Axis Adjustment, and Piping>
3-31
IM 11Y01D01-01EN
3.4.1
Purge Gas Piping for In-situ Installation
(1) When not using the validation function
If the installation into the process is in situ and the validation function is not used, connect the
piping as shown in Figure 3.21. For analyzer internal purge, feed nitrogen gas through purge port
A in Figure 3.21 for both the LU and SCU. For process window purge, feed nitrogen gas through
the purge port of the alignment flange.
Exhaust
Exhaust
N
2
gas
LU side
SCU side
N
2
gas
N
2
gas
N
2
gas
Alignment flange
Alignment flange
Process flange
Measured gas
Sealing plug
A
A
Sealing plug
Figure 3.21
Piping for in-situ installation when not using the validation function
(2) When using the validation function
If the installation into the process is in situ and the validation function is used, connect the piping
as shown in Figure 3.22. For analyzer internal purge, feed nitrogen gas through purge port A
in Figure 3.22 for both the LU and SCU. For the SCU, since check gas needs to be fed during
validation, connect the piping with a three-way valve so that the gas can be switched between
nitrogen gas and check gas. For process window purge, feed nitrogen gas through the purge port
of the alignment flange in the same manner as “(1) When using the validation function.”
Exhaust
Exhaust
N
2
gas
N
2
gas
N
2
gas
Measured gas
N
2
gas
Switching valve
Checking gas
A
A
Alignment flange
Alignment flange
Process flange
Sealing plug
Sealing plug
LU side
SCU side
Figure 3.22
Piping for in-situ installation when using the validation function
(3) When using a process isolation flange but not the validation function
If the installation (in-situ or bypass) into the process uses a process isolation flange but validation
will not be conducted, connect the piping as shown in Figure 3.23.
For analyzer internal purge, feed nitrogen gas through purge port A in Figure 3.23 for both the LU
and SCU. Connect the piping so that the TDLS8000 purge gas also flows through the inside of
the alignment flange.
For process window purge, feed nitrogen gas through the purge port of the process isolation
flange.
3rd Edition: Jun. 10, 2016-00
Содержание TDLS8000
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