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<9. Inspection and Maintenance>
9-39
IM 11Y01D01-01EN
NOTE
For online validation only, the stabilization wait time cannot be aborted because the
measurements in the normal process condition are used in the validation result. If you abort,
validation itself will be aborted, and the results will not be displayed.
As an example, the procedure to abort process purging for semi-automatic span calibration is
explained below.
(1) Purging with span calibration gas
When you execute semi-automatic span calibration, span calibration gas purging begins.
Note that touching ABORT at this point will abort the span calibration.
(2) Purging with process gas
Immediately after the span calibration gas purge time elapses, the TDLS8000 calculates
the span calibration result. Then, process gas purging takes place. Since span calibration is
already completed at this point, you can view the span calibration result even if you abort the
stabilization wait time. Check that the concentration has stabilized, and then touch ABORT.
3rd Edition: Jun. 10, 2016-00
Содержание TDLS8000
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