Vigilantplant TDLS8000, Руководство пользователя

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<10. Troubleshooting>
10-9
IM 11Y01D01-01EN
10.4.3 Process Window Replacement Procedure (Process
isolation flange)
The procedure for replacing the process window mounted on a process isolation flange is
provided below.
NOTE
Before removing the process window, check that the process is completely stopped or that the
TDLS8000 is isolated from the process and no process gas will be discharged. Never remove a
process window while the process is running as it is extremely dangerous.
CAUTION
Be careful in handling the process window as it is made of optical glass.
(1) Turn the power off.
(2) Stop the purge gas.
(3) Remove the purge piping.
(4) Remove the TDLS8000 from the process.
(If necessary, separate it completely from the process such as by using a process isolation
valve.)
(5) Remove the alignment flange.
(6) Check the stained area of the process window of the process isolation flange, and remove
the process window.
(7) Loosen the six M5 screws with hexagonal holes on the process window holder installed in
the process isolation flange, and remove the process window.
Make sure not to drop the process window. There is no mechanism from preventing the
screws with hexagonal holes or the washers from falling. Make sure not to drop or lose
them.
(8) Install a new process window. Replace the O-ring also.
The position of the O-ring is indicated in Figure 10.5. Firmly mount the O-ring in the O-ring
groove.
Process isolation flange
Process window
Hole with a hexagonal hole
O-ring
Washer
Figure 10.5 Replacing the process window and O-ring of a process isolation flange
3rd Edition: Jun. 10, 2016-00