Vigilantplant TDLS8000, Руководство пользователя

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<3. Installation, Wiring, Optical Axis Adjustment, and Piping>
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IM 11Y01D01-01EN
An alignment flange as shown in Figure 3.16 is mounted on the LU, and an LAO unit as shown in
Figure 3.17 is mounted on the SCU. In all cases, the angle adjustment nuts are used to adjust the
optical axis. Although the LAO unit is used, the laser beam position will vary greatly even with a
slight change in the optical axis because the process optical path length is long. As such, a more
detailed adjustment will be necessary.
Bellows
Quick connector
Alignment part
LAO unit
Process flange
SCU
Instrument mounting flange
Process flange
Alignment flange
Angle adjustment nut (8)
Nut (8)
Figure 3.17 Optical axis adjustment when using an LAO unit (SCU side)
Use the angle adjustment nuts shown in Figure 3.17 to adjust the optical axis. Check the
transmission each time you turn an angle adjustment nut one-eighth of a turn. Wait until the
transmission shown on the display is updated at least twice. Repeat this process while regularly
checking the transmission value.
Follow the procedure below to adjust the optical axis when the LAO is used. Adjust one side at a
time starting with the LU side. The proper optical axis adjustment may not be achieved when the
optical axis on the LU and SCU is changed at the same time.
(1) Checking the installation condition (LU and SCU)
Check the initial condition of the alignment flange and the LAO unit to see if the LU and SCU
are facing each other. If it is apparent that they are not, adjust the alignment coarsely before
continuing with the rest of the procedure.
(2) Coarsely adjusting the laser unit (LU) side
Loosen the angle adjustment nuts on the LU side.
While viewing the transmission value, move the LU with your hand to perform coarse
adjustment. Repeat the adjustment in the vertical direction first and then the horizontal
direction.
Find the position that yields the maximum transmission value, and tighten the angle
adjustment nuts with your fingers. From this position, begin the fine adjustment.
While making adjustments, keep in mind that the change in transmission may be extremely
small depending on the laser incident angle to the SCU. Not paying attention to this fact may
hinder the correct optical axis adjustment of the SCU.
If change in the transmission cannot be detected, adjust both the vertical and horizontal
direction in more detail.
3rd Edition: Jun. 10, 2016-00