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<9. Inspection and Maintenance>
9-37
IM 11Y01D01-01EN
l
YH8000 Execution Screen
(1) Starting validation
Execute “Semi-Auto Online Validation 1.” Tap Start to begin.
(2) Purging with the check gas
When validation starts, the stream is automatically switched, and the validation cell is
purged with check gas. The purge time is the time specified by “Validation gas Purge time.”
Tapping Abort cancels validation.
3rd Edition: Jun. 10, 2016-00
Содержание TDLS8000
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