Vigilantplant TDLS8000, Руководство пользователя

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<10. Troubleshooting>
10-8
IM 11Y01D01-01EN
10.4.2 Process Window Replacement Procedure (Alignment
flange)
The procedure for replacing the process window mounted on an alignment flange is provided
below.
NOTE
Before removing the process window, check that the process is completely stopped or that the
TDLS8000 is isolated from the process and no process gas will be discharged. Never remove a
process window while the process is running as it is extremely dangerous.
CAUTION
Be careful in handling the process window as it is made of optical glass.
(1) Turn the power off.
(2) Stop the purge gas.
(3) Remove the purge piping.
(4) Remove the TDLS8000 from the process.
(If necessary, separate it completely from the process such as by using a process isolation
valve.)
(5) Check the stained area of the process window, and remove the relevant process window.
(6) Loosen the four M4 screws with hexagonal holes on the process window holder installed in
the alignment flange, and remove the process window.
(7) Install a new process window. Replace the O-ring also.
The position of the O-ring is indicated in Figure 10.4. Firmly mount the O-ring in the O-ring
groove.
Alignment flange
Process window
Hole with a hexagonal hole
O-ring
Figure 10.4 Replacing the process window and O-ring of an alignment flange
(8) Pay attention to the orientation of the process window. Install it in the same orientation as
before.
Tighten the screws evenly.
(9) After installing the process window, install the TDLS8000 for use.
3rd Edition: Jun. 10, 2016-00