Vigilantplant TDLS8000, Руководство пользователя

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<6. Configuration>
6-17
IM 11Y01D01-01EN 3rd Edition: Jun. 10, 2016-00
Table 6.1 Installation conditions
Installation conditions Calculation formula
LU section, SCU section and alignment flange only A + B + A’ + B’
When using insertion tube A + B + E + A’ + B’ + E’
When using process insulation flange A + B + C + D + A’ + B’ + C’ + D’
When using process insulation flange and insertion tube A + B + C + D + E + A’ + B’ + C’ + D’ + E’
Note: In case of Zone 1 model, value A is A1 + A2, value A’ is A’1 + A’2.
Table 6.2 A, and A’ value by Gas parameter (General purpose and zone 2 model)
Model name and code
Optics Accessory,
Option Code
A (mm)
LU side
A’ (mm)
SCU side
Model Type Gas parameter
TDLS8000
-G1
-G2
-D2
-C2
-S2
-E2
-X1
other than -LA, /D 149.8 130.6
-LA 142.4 235.6
/D 142.4 130.6
-X2
other than -LA, /D 149.8 130.6
-LA 142.4 235.6
/D 142.4 130.6
-C1 - 72.2 92.6
-C2
other than -LA, /D 72.2 92.6
-LA 72.2 225.6
/D 72.2 92.6
-C3
other than -LA, /D 72.2 92.6
-LA 72.2 225.6
/D 72.2 92.6
-C4
other than -LA, /D 72.2 92.6
-LA 72.2 225.6
/D 72.2 92.6
-C5 - 72.2 92.6
-A1 - 72.2 92.6
-A2 - 72.2 92.6
-D1 - 72.2 92.6
-D5 - 72.2 92.6
-H1 - 151.2 132.6
-H3 - 152.2 132.6
-H4 - 150.4 130.6
-S1 - 72.2 92.6
-L1 - 72.2 92.6