6-56 Parameter Storage Commands
SRS Residual Gas Analyzer
Parameters:
MVparam, param: 0-2490:
The parameter, interpreted as a CDEM bias
voltage in units of Volts, is stored in the non-volatile memory of the head.
MV?:
CDEM Bias voltage query.
Error checking:
The absence of a parameter (i. e. MV) is treated as an error.
No default value is available.
A bad-command communications error is reported when this command is
invoked in a unit with no CDEM option installed.
SPparam, param:0.0000 - 10.0000, ?
Description
: Partial Pressure Sensitivity Factor storage and query.
Echo:
Query Response
Store a value of Partial Pressure Sensitivity, expressed in units of mA/Torr, in
the non-volatile memory of the SRS RGA head.
Important:
The sensitivity factor is not used internally by the RGA to turn ion
currents into partial pressures, it is simply stored in memory so it can be read and
used by any host computer connected to the instrument (See HV command.)
Partial Pressure Sensitivity factors are gas specific, probe specific, and highly
dependent on the ionizer and quadrupole mass filter conditions and on aging of
the probe.
Note
: The parameter value loaded at the factory is the partial pressure sensitivity
factor for N
2
under default ionizer conditions.
Parameters:
SPparam, param:0.0000 - 10.0000:
The parameter, interpreted as a partial
pressure senstivity factor in units of mA/Torr, is stored in non-volatile memory
of the head. . Typical value is 0.1 under default ionizer settings.
SP?:
Partial Pressure Sensitivity factor query.
Error checking:
Parameter must be within specified range.
No default value is available.
STparam, param:0.0000 - 100.0000, ?
Description
: Total Pressure Sensitivity Factor storage.
Echo:
Query Response
Store a value of Total Pressure Sensitivity, expressed in units of mA/Torr, in the
non-volatile memory of the SRS RGA head.
Содержание RGA100
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