Appendix D
SRS Residual Gas Analyzer
19
we will run a table scan of four different masses with a 10 to 50 AMU scan range and we will log all the
data the RGA produces. Change your dialog to look like the following figure:
To change the mass range you can either click and drag the graphical bar labeled Mass Range, or enter the
initial and final masses directly in the spaces provided. To add masses for a table scan, type the mass in
the box labeled “AMU” and the noise floor value you wish to use for that mass in the box labeled “NF”.
If you have an electron multiplier, you also have the option of turning it on or off by clicking in the box
labeled “CEM”.
To set the log filename, simply click on “Select log file” and follow the prompts to select the directory
and filename you wish to use. Click on the toggle button next to the label “In Table Mode,” so that
“record all backlog data” is selected.
If you wish to perform leak testing, you must use table mode. Select a particular mass for leak testing by
highlighting that mass in the gray background table. In the example above, mass 44 is highlighted. After
you click on “Use for leak detect” a black diamond will appear to the left of the mass used for leak
detection.
Exit the Scanning & Logging dialog by pressing “OK”.
Running a Scan
Select Table Mode from the main menu using the pull down menu next to the label “Mode”. The main
menu should look like the next figure before you are ready to run the scan.
Содержание RGA100
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