3-14
3
Operation Examples (Position measurement)
MSR-CHNG
REG-CHNG
PC-MONTR SET-SCRN
MANL-TYP-CHG
X0~6
:
Y0~7
:
BUSY
:
F H C1ALLC2NO
VX.X
(TYPE00)
OK
MEAS. XXXXXXms
MEAS0 CAM1 POS-DEVIATION
REGST NO.0(0~7)
X COORD.(MDL0)X= 379.0 OK
Y COORD.(MDL0)Y= 214.0 OK
X DEVIAT(MDL0) X= -001.0 OK
Y DEVIAT(MDL0) Y= +000.0OK
MATCH (MDL0) +09735 OK
Final evaluation result (*1)
Measuring time
Degree of match (*2)
Center coordinates of new image
window, and judgment result
[Display of measured result]
Search window
Positioning mark
Image window
Deviation of the new object in the
window and final evaluation
*3
Continued from the preceding page
(11) Measuring the positional deviation
Press the TRG/BRT key, and the result of measuring the positional deviation (absolute position)
from the stored positioning mark image will be displayed.
*1
The final evaluation result will be displayed as "OK" in the upper left corner of the screen when
all of the items have been evaluated acceptable.
If there is a single unacceptable item, "NG" will be displayed.
*2
"MATCH:+09735" means that the degree of match (percentage of pixels that match) between
pixels in the new image and the stored image is 97.35%.
[The acceptance and rejection criteria based on the degree of match]
In order to evaluate acceptability based on the degree of match, first an image of a good
specimen is stored for reference. Then, an image of defective specimen is compared for
degree of match. Finally an image of another good specimen is compared. These
comparisons establish the degree of match to be used for setting the limits used for working
comparisons.
For example, the degree of match for a non-defective object is 90% or more and that for a
defective object is 70% or less, then the threshold value for degree of match can be set to
approx. 85%. This allows the evaluation acceptability to be made.
*3
When the final evaluation result is OK, Y0 is turned ON, and a filled box is displayed. (When
the result is NG, an empty box is displayed.)
When the auxiliary relay C112 is turned ON, Y0 is turned ON according to the condition set in
step (9)
for final evaluation output.